한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
- /
- Pages.542-542
- /
- 2008
세리아 연마제 첨가에 따른 산화막 CMP 특성 연구
A Study on the Oxide CMP Characteristics According to the $CeO_2$ Abrasive Adding
- Han, Sang-Jun (Department of Electrical Engineering, Chosun University) ;
- Lee, Young-Kyun (Department of Electrical Engineering, Chosun University) ;
- Park, Sung-Woo (Department of Electrical Engineering, Chosun University) ;
- Seo, Yong-Jin (Department of Electrical Engineering, Daebul University:) ;
- Lee, Woo-Sun (Department of Electrical Engineering, Chosun University)
- 발행 : 2008.06.19