Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.06a
- /
- Pages.368-369
- /
- 2008
Mechanical properties of polycrystalline 3C-SiC thin films with various doping concentrations
도핑 농도에 따른 다결정 3C-SiC 박막의 기계적 특성
- Lee, Yun-Myung (School of Electrical Engineering, University of Ulsan) ;
- Chung, Gwiy-Sang (School of Electrical Engineering, University of Ulsan)
- Published : 2008.06.19
Abstract
This paper describes the mechanical properties of poly(polycrystalline) 3C-SiC thin film with various doping concentration, in which poly 3C-SiC thin film's mechanical properties according to the n-doping concentration 1%