한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

RF-스퍼터링의 파워변화에 따른 플라스틱 기판 위에 증착된 ZnO박막의 구조적, 광학적 특성

Department of Nano Semiconductor, Korea Maritime University

  • 김준제 (한국해양대학교 나노반도체학과) ;
  • 김홍승 (한국해양대학교 나노반도체학과) ;
  • 이주영 (한국해양대학교 나노반도체학과) ;
  • 이종훈 (한국해양대학교 나노반도체학과) ;
  • 이다정 (한국해양대학교 나노반도체학과) ;
  • 이원재 (동의대학교 나노학과 전자세라믹스센터) ;
  • ;
  • 조채룡 (부산대학교 나노메디칼공학과) ;
  • 김진혁 (전남대학교 재료공학과)
  • 발행 : 2008.06.19
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초록

Zinc-oxide(ZnO) films were deposited on PC(polycarboanate) and PES(polyethersulphone) substrates by using RF(radio-frequency)sputter with various rf sputtering Power at a room temperature. The effects of rf sputtering Power on the structural and optical properties of ZnO films were investigated by using atomic force microscopy, X-ray diffraction, and UV spectrophotometer. The most excellent structural and properties of a ZnO film are obtained in the condition of an rf-power of 150 W. This film shows larger Grain size and lower surface roughness and a higher optical transmittance of over 80 % in the visible range than other films deposited in the different conditions of rf- power. Regardless of substrate types, The presence of a strong diffraction peak indicates that films have a (0 0 2) preferred orientation associated with the hexagonal phase.

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