한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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- Pages.123-123
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- 2008
$HNO_3$ 전해액이 Cu 표면에 미치는 영향
Effect of copper surface to $HNO_3$ electrolyte
- Park, Sung-Woo (Department of Electrical Engineering, Chosun University) ;
- Han, Sang-Jun (Department of Electrical Engineering, Chosun University) ;
- Lee, Young-Kyun (Department of Electrical Engineering, Chosun University) ;
- Lee, Woo-Sun (Department of Electrical Engineering, Chosun University) ;
- Seo, Yong-Jin (Department of Electrical Engineering, Daebul University)
- 발행 : 2008.06.19
초록
본 논문에서는 Cu의 ECMP 적용을 위해
키워드