Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.06a
- /
- Pages.82-83
- /
- 2008
Effects of the substrate temperature on the properties of Al doped ZnO films
Al doped ZnO 박막 특성에 미치는 증착 온도의 영향
- Kim, Yong-Hyun (Korea University) ;
- Seong, Tae-Yeon (Korea University) ;
- Kim, Won-Mok (Korea Institute of Science and Technology)
- Published : 2008.06.19
Abstract
AI doped ZnO (AZO) films, and intentionally Zn added AZO (ZAZO) films were prepared on Corning glass by rf magnetron sputtering, and the electrical, optical, and structural properties of the as-deposited films together with the air annealed films were investigated. The resistivity of the AZO films increased with increasing substrate temperature and having minimum resistivity at