Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.06a
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- Pages.47-47
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- 2008
Preparation of p-type transparent semiconductor $SrCu_2O_2$ thin film by RF magnetron sputtering
RF 마그네트론 스퍼터링에 의한 p형 투명 반도체 $SrCu_2O_2$ 박막의 제조
- Kim, Sei-Ki (Korea Institute of Ceramic Engineering & Technology, Electronic materials lab.) ;
- Seok, Hye-Won (Korea Institute of Ceramic Engineering & Technology, Electronic materials lab.) ;
- Lee, Mi-Jae (Korea Institute of Ceramic Engineering & Technology, Electronic materials lab.) ;
- Choi, Byung-Hyun (Korea Institute of Ceramic Engineering & Technology, Electronic materials lab.) ;
- Jeong, Won-Hee (LG micron Co., Ltd., R&D Center)
- 김세기 (요업기술원 전자소재팀) ;
- 석혜원 (요업기술원 전자소재팀) ;
- 이미재 (요업기술원 전자소재팀) ;
- 최병현 (요업기술원 전자소재팀) ;
- 정원희 (LG마이크론(주) LG연구소 LG소재부품연구소)
- Published : 2008.06.19
Abstract
P-type transparent semiconductor