한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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- Pages.225-225
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- 2008
기판온도에 따른 PLZT박막의 결정성과 전기적 특성
Effects of substrate temperatures on the properties of PLZT thin films deposited by RF magnetron sputtering
- Lee, In-Seok (School of Materials Science and Engineering, Pusan National University) ;
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Yoon, Ji-Eun
(School of Materials Science and Engineering, Pusan National University) ;
- Kim, Sang-Jih (School of Materials Science and Engineering, Pusan National University) ;
- Son, Young-Guk (School of Materials Science and Engineering, Pusan National University)
- 발행 : 2008.11.06
초록
PLZT 박막을 Pt/Ti/
키워드