한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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- Pages.200-200
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- 2008
IDC 패턴에 따른 BST 전기적 특성
Electrical Characterization of BST Thin Film by IDC pattern
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Roh, Ji-Hyoung
(Korea Univ.) ;
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Kim, Sung-Su
(Korea Univ.) ;
- Song, Sang-Woo (Korea Univ.) ;
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Kim, Ji-Hong
(Korea Univ.) ;
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Koh, Jung-Hyuk
(Kwangwoon Univ.) ;
- Moon, Byung-Moo (Korea Univ.)
- 발행 : 2008.11.06
초록
This paper reports on electrical characterization by IDC pattern using BST