한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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- Pages.73-73
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- 2008
PECVD로 증착된 $SiO_2$ 의 non-uniformity 특성 연구
The study on the $SiO_2$ film non-uniformity by Plasma Enhanced Chemical Vapor Deposition
- Ham, Yong-Hyun (Korea Univ.) ;
- Kwon, Kwang-Ho (Korea Univ.)
- 발행 : 2008.11.06
초록
In this work, the study on the