Bulletin of the Korean Space Science Society (한국우주과학회:학술대회논문집(한국우주과학회보))
- 2008.10a
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- Pages.37.3-37.3
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- 2008
Current Progress in Fabrication of Ta and Nb based STJs for an Astronomical Detector
- Yoon, Ho-Seop (Korea Astronomy and Space Science Institute(kASI)) ;
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Park, Young-Sik
(Korea Astronomy and Space Science Institute(kASI))
;
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Park, Jang-Hyun
(Korea Astronomy and Space Science Institute(kASI))
;
- Yang, Min-Kyu (Korea Institute of Science and Technology(KIST)) ;
-
Lee, Jeon-Kook
(Korea Institute of Science and Technology(KIST))
;
- Chong, Yon-Uk (Korea Research Institute of Standrds and Science(KRISS)) ;
- Lee, Yong-Ho (Korea Research Institute of Standrds and Science(KRISS)) ;
- Lee, Sang-Kil (Korea Research Institute of Standrds and Science(KRISS)) ;
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Kim, Dong-Lak
(Korea Basic Science Institute(KBSI))
;
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Kim, Sug-Whan
(Yonsei University)
- Published : 2008.10.22
Abstract
STJ(Superconducting Tunnel Junction) technique offers next generation photon detectors exhibiting high energy resolution, high quantum efficiency and photon counting ability over the broad wavelength range from X-ray to NIR. We report the succcess in fabrication of Ta/Al-AlOx-Al/Ta and Nb/Al-AlOx-Al/Nb micro structure deposited on sapphire substrates using various techniques including UV photolithography, DC Sputtering, RIE, and PECVD technique. The characterization experiment was undertaken in an Adiabatic Demagnetization Refrigerator at an operating temperature below 50mK. The details of experimental investigations for electrical characterization of STJ of
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