한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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Preparation of MgO Thin Film by Neutral Beam Assisted Deposition as a Protective Layer of AC PDP

  • Li, Zhao-Hui (Dept. of Electronics Engineering, Kyungwon University) ;
  • Kwon, Sang-Jik (Dept. of Electronics Engineering, Kyungwon University)
  • Published : 2008.10.13
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Abstract

In this experiment, MgO thin films were deposited by oxygen neutral beam assisted deposition (NBAD) method. The results show that neutral beam energy plays an important role in the surface morphology, crystal orientation, defects of MgO thin films, and discharge characteristics of AC PDP.

Keywords