한국광학회:학술대회논문집 (Proceedings of the Optical Society of Korea Conference)
- 한국광학회 2008년도 하계학술발표회 논문집
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- Pages.133-134
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- 2008
프로젝션 노광기의 조명 광학계 설계
The Optical Design of Illumination System for Projection Stepper
- Yeo, Jun-Yeob (Department of Physics and Astronomy, Seoul National University) ;
- Kim, Moon-Seok (Department of Physics and Astronomy, Seoul National University) ;
- Won, Ki-Tak (Department of Physics, Faculty Board, Air Force Academy) ;
- Wei, Chang-Hyun (Opto Finetech Co.,Ltd) ;
- Kang, Heung-Seok (Opto Finetech Co.,Ltd) ;
- Kim, Jai-Soon (Department of Physics and Astronomy, Seoul National University)
- 발행 : 2008.07.01