한국정보통신학회:학술대회논문집 (Proceedings of the Korean Institute of Information and Commucation Sciences Conference)
- 한국해양정보통신학회 2008년도 추계종합학술대회 B
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- Pages.61-65
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- 2008
High-Q factor ZnO-based Film Bulk Acoustic Resonator Devices
- Yoon, Gi-Wan (Information and Communications University(ICU)) ;
- Mai, Linh (Information and Communications University(ICU))
- 발행 : 2008.10.31
초록
In this paper, we studied a ZnO-based film bulk acoustic resonator (FBAR) device fabricated on a specially designed multi-layerd Bragg reflector part. Very thin chromium adhesion layers (0,03um thick) were additionally deposited to improve the quality of the Bragg reflector and some thermal treatments were performed to improve the resonant characteristics of the device. At the operating frequency of