Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Design of a large deflection 2 DOF scanning mirror using an electromagnetic force

전자기력을 이용한 대변위 구동 2축 스캐닝 미러의 설계

  • Lee, Kyoung-Gun (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Jang, Yun-Ho (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Yoo, Byung-Wook (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Jin, Joo-Young (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Lim, Yong-Geun (RMI Korea) ;
  • Kim, Yong-Kweon (School of Electrical Engineering and Computer Science, Seoul National University)
  • 이경건 (서울대 전기.컴퓨터 공학부) ;
  • 장윤호 (서울대 전기.컴퓨터 공학부) ;
  • 유병욱 (서울대 전기.컴퓨터 공학부) ;
  • 진주영 (서울대 전기.컴퓨터 공학부) ;
  • 임용근 (한국알엠아이(주)) ;
  • 김용권 (서울대 전기.컴퓨터 공학부)
  • Published : 2008.10.31
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Abstract

In this paper, we present the design of an electromagnetic scanning mirror with rotated serpentine springs. We considered three types of torsional springs: simple beam springs (SBS), classic serpentine springs (CSS), and rotated serpentine springs (RSS). The analysis was done for an electrical resistance, differences in the mode-frequency, and resonances regarding to spring thickness. Electromagnetic coils under the mirror plate were also analyzed for power consumption and the mechanical deflection. From the analysis result, RSS and electromagnetic coils were designed for the silicon scanning mirror.

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