Heat transfer analysis of CFD at the Ultrasonic horn bonding flip chip

플립칩 접합용 초음파 혼의 CFD 열유동 해석

  • 심현석 (서울시립대학교 대학원 기계정보공학과) ;
  • 리광훈 (서울시립대학교 기계정보공학과)
  • Published : 2008.11.05

Abstract

This paper introduce the CFD analysis for predicting the heat transfer at the Ultrasonic horn. Approximately Ultrasonic horn separates two part. One is preheating part and the other is cooling part. Temperature of preheating part rise up by $260^{\circ}C$ that make it possible to attach a chip to a semiconductor. Also there is a piezo material in the cooling part. When piezo work, it generates heat of $100^{\circ}C$. It can stand by $150^{\circ}C$. But the high temperature conducted from the preheating part has a bad affect on the piezo. These situation make it necessary cooling at piezo. Previously except of the piezo, all of them are composed of the SUS440c that has good thermal conductivity. This study shows way that not only cooling the piezo but also cutting off the conduction between preheating part and cooling part by using the Ti and Duralumin that have low thermal conductivity compare with the SUS440c. Conclusion of CFD analysis that the heat coming from the piezo can't be transferred the horn cause of the Ti and Duralumin.

Keywords