Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2008.11a
- /
- Pages.1847-1850
- /
- 2008
Experiment and Numerical Study on Thermal Characteristics of UV-NIL Process Considering the Cure Kinetics of Photo-polymer
레진의 경화 반응을 고려한 UV-NIL공정의 열특성에 관한 실험 및 수치해석 연구
- Kim, Woo-Song ;
-
Park, Gyeong-Seo
;
- Nam, Jin-Hyun ;
- Yim, Hong-Jae ;
- Jang, Si-Yeol ;
-
Lee, Kee-Sung
;
-
Jeong, Jay
;
-
Lim, Si-Hyeong
;
-
Shin, Dong-Hoon
- 김우송 (국민대학교 기계공학과) ;
-
박경서
(국민대학교 기계공학과)
;
- 남진현 (국민대학교 기계자동차공학부) ;
- 임흥재 (국민대학교 기계자동차공학부) ;
- 장시열 (국민대학교 기계자동차공학부) ;
-
이기성
(국민대학교 기계자동차공학부)
;
-
정재일
(국민대학교 기계자동차공학부)
;
-
임시형
(국민대학교 기계자동차공학부)
;
-
신동훈
(국민대학교 기계자동차공학부)
- Published : 2008.11.05
Abstract
The process conditions during ultraviolet nanoimprint lithography (UV-NIL) process such as temperature, stamping pressure, UV irradiation, etc. are effective factors for successful imprinting of complex and fine patterns. In this study, the effects of aluminum mold on the thermal characteristics of UV-NIL process were investigated through imprinting experiments and numerical simulations. The temperature of polymer resin on mold was measured to study thermal characteristics during UV curing. From the experimental and numerical results, the importance of curing reaction control for UV-NIL process was discussed for deformation characteristics.