적합직교분해법을 이용한 AFM 마이크로캔틸레버의 모드해석

Modal Analysis of the Tapping AFM Microcantilevers Using Proper Orthogonal Decomposition

The proper orthogonal decomposition(POD) is used to the modal analysis of microcantilever of dynamic mode atomic force microscopy(AFM). The proper orthogonal modes(POM) are extracted from vibrating signals of microcantilever when it resonates and taps the sample. We present recent ideas based on POD and detailed experiments that yield new perspectives into the microscale structures. The linearized modeling technique based on POD is very useful to show the principal characteristics of the complex dynamic responses.