대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2008년도 제39회 하계학술대회
- /
- Pages.1472-1473
- /
- 2008
국부적 경화된 고속, 고감도 폴리이미드 습도 센서
A Locally Cured Polyimied-based Humidity Sensor with High Sensitivity and High Speed
- Kwak, Ki-Young (Korea University) ;
- Lee, Myung-Jin (Korea University) ;
- Kim, Jae-Sung (Korea University) ;
- Kang, Moon-Sik (Korea University) ;
- Min, Nam-Ki (Korea University)
- 발행 : 2008.07.16
초록
Polyimide thin films were cured locally using MEMS microhotplates. The polyimide locally cured at temperature over 350
키워드