대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2008년도 제39회 하계학술대회
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- Pages.1454-1455
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- 2008
마이크로 CCR구현을 위한 저전압 구동 압전 반사경 설계
Design of Low Voltage Piezoelectric Actuated Mirror for Micro-CCR
- Lee, Duk-Hyun (Kwangwoon University) ;
- Yang, Chang-Soo (Kwangwoon University) ;
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Park, Jae-Y.
(Kwangwoon University)
- 발행 : 2008.07.16
초록
This paper present a piezoelectric actuated mirror with PZT cantilevers, torsional bars and hinges for Micro-CCR (corner cube retroreflector). The actuated mirror with low voltage and large tilting angle is designed and simulated by using FEM (Finite Element Method) simulator (CoventorWare). The tilting angle of actuated mirror is 2.93
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