Design of Low Voltage Piezoelectric Actuated Mirror for Micro-CCR

마이크로 CCR구현을 위한 저전압 구동 압전 반사경 설계

  • Published : 2008.07.16

Abstract

This paper present a piezoelectric actuated mirror with PZT cantilevers, torsional bars and hinges for Micro-CCR (corner cube retroreflector). The actuated mirror with low voltage and large tilting angle is designed and simulated by using FEM (Finite Element Method) simulator (CoventorWare). The tilting angle of actuated mirror is 2.93$^{\circ}$ at low voltage of 5V.

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