대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2008년도 제39회 하계학술대회
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- Pages.1260-1261
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- 2008
PET 기판 위에 증착된 ZnO:Al 투명 전도막의 전기적 특성에 미치는 바이어스전압의 효과
Effective of bias voltage as electrical property of ZnO:Al transparent conducting films on polyethylen terephthalate substrate
- Park, Byung-Wook (Department of Electrical and Electronic Engineering, Kyungsung University) ;
- Jessie, Darma (Department of Electrical and Electronic Engineering, Kyungsung University) ;
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Sung, Youl-Moon
(Department of Electrical and Electronic Engineering, Kyungsung University) ;
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Kwak, Dong-Joo
(Department of Electrical and Electronic Engineering, Kyungsung University)
- 발행 : 2008.07.16
초록
Aluminium doped zinc oxide (ZnO:Al) thin film has emerged as one of the most promising transparent conducting electrode in flat panel displays(FPD) and in photovoltaic devices since it is inexpensive, mechanically stable, and highly resistant to deoxidation. In this paper ZnO:Al thin film was deposited on the polyethylene terephthalate(PET) substrate by the capacitively coupled r.f. magnetron sputtering method. Wide ranges of bias voltage, -30V
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