Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2008.07a
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- Pages.1260-1261
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- 2008
Effective of bias voltage as electrical property of ZnO:Al transparent conducting films on polyethylen terephthalate substrate
PET 기판 위에 증착된 ZnO:Al 투명 전도막의 전기적 특성에 미치는 바이어스전압의 효과
- Park, Byung-Wook (Department of Electrical and Electronic Engineering, Kyungsung University) ;
- Jessie, Darma (Department of Electrical and Electronic Engineering, Kyungsung University) ;
- Sung, Youl-Moon (Department of Electrical and Electronic Engineering, Kyungsung University) ;
- Kwak, Dong-Joo (Department of Electrical and Electronic Engineering, Kyungsung University)
- Published : 2008.07.16
Abstract
Aluminium doped zinc oxide (ZnO:Al) thin film has emerged as one of the most promising transparent conducting electrode in flat panel displays(FPD) and in photovoltaic devices since it is inexpensive, mechanically stable, and highly resistant to deoxidation. In this paper ZnO:Al thin film was deposited on the polyethylene terephthalate(PET) substrate by the capacitively coupled r.f. magnetron sputtering method. Wide ranges of bias voltage, -30V
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