Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Development of Maglev Vehicle for Semiconductor Transport System in Small Scale

반도체 반송 시스템을 위한 축소형 자기부상 열차 시스템 개발

  • Sung, So-Young (Korea Institute of Machinery & Meterials, Research division of system engineering) ;
  • Choi, Jang-Young (ChungNam National University, Dept. of Electric Engineering) ;
  • Sung, Ho-Kyung (Korea Institute of Machinery & Meterials, Research division of system engineering) ;
  • Cho, Han-Wook (Korea Institute of Machinery & Meterials, Research division of system engineering) ;
  • Jang, Seok-Myung (ChungNam National University, Dept. of Electric Engineering)
  • 성소영 (한국기계연구원 시스템 엔지니어링 연구본부) ;
  • 최장영 (충남대학교 전기공학과) ;
  • 성호경 (한국기계연구원 시스템 엔지니어링 연구본부) ;
  • 조한욱 (한국기계연구원 시스템 엔지니어링 연구본부) ;
  • 장석명 (충남대학교 전기공학과)
  • Published : 2008.07.16
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Abstract

This paper propose nonlinear electromagnet suspension system model and defines electromagnet design specification of Maglev vehicle for transport system of semiconductor manufacturing line. The bandwidth of the acceleration sensor is defined and manufactured using i-mems technique acceleration sensor from this Nonlinear electromagnet suspension model. Through the simulation of non-linear model it was possible to compare the gain with the experiment to confirm the accuracy of the nonlinear suspension system. Till now mainly linear model has been used in many electromagnet suspension system, which results different gains in simulation and experiments. This more accurate non-linear model can be applied in many ways in designing electromagnet suspension systems.

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