Energy Distribution Function in $SF_6-Ar$ Mixtures Gas used by Simulation

MCS-BEq 시뮬레이션에 의한 $SF_6-Ar$ 에너지 분포함수

  • Published : 2007.05.10

Abstract

Energy distribution function for electrons in $SF_6-Ar$ mixtures gas used by Simulation has been analysed over the E/N range 30${\sim}$300[Td] by a two term Boltzmann equation and by a Monte Carlo Simulation using a set of electron cross sections determined by other authors, experimentally the electron swarm parameters for 0.2[%] and 0.5[%] $SF_6-Ar$ mixtures were measured by time-of-flight (TOF) method. The results obtained from Boltzmann equation method and Monte Carlo simulation have been compared with present and previously obtained data and respective set of electron collision cross sections of the molecules.

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