Proceedings of the SAREK Conference (대한설비공학회:학술대회논문집)
- 2007.06a
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- Pages.212-212
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- 2007
Evaluation and Prediction of Cleanliness Level in Mini-environment
국소환경시스템 내부에서 청정도 평가 및 예측
- Noh, Kwang-Chul (Institute of industrial Technology, University of Seoul) ;
- Lee, Hyeon-Cheol (MCC TG of Manufacturing Engineering R&D Institute) ;
- Park, Jung-Il (MCC TG of Manufacturing Engineering R&D Institute) ;
- Kim, Dae-Young (MCC TG of Manufacturing Engineering R&D Institute) ;
- Lee, Seung-Hun (MCC TG of Manufacturing Engineering R&D Institute) ;
- Oh, Myung-Do (Department of Mechanical and Information Engineering, University of Seoul)
- 노광철 (서울시립대학교 산업기술연구소) ;
- 이현철 ((주)삼성전기 MCC TG) ;
- 박정일 ((주)삼성전기 MCC TG) ;
- 김대영 ((주)삼성전기 MCC TG) ;
- 이성훈 ((주)삼성전기 MCC TG) ;
- 오명도 (서울시립대학교 기계정보공학과)
- Published : 2007.06.20
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