대한설비공학회:학술대회논문집 (Proceedings of the SAREK Conference)
- 대한설비공학회 2007년도 하계학술발표대회 논문집
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- Pages.209-209
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- 2007
실란가스를 이용한 회전 반도체 웨이퍼로의 실리콘 박막 증착 수치해석
Numerical Analysis on Silicon Film Deposition on a Heated Rotating Semiconductor Wafer from Silane Gas
- Song, Gen-Soo (Aerosol and Contamination Control Labortary, Korea Institute of Industrial Technology) ;
- Yoo, Kyung-Hoon (Aerosol and Contamination Control Labortary, Korea Institute of Industrial Technology)
- 발행 : 2007.06.20