Proceedings of the SAREK Conference (대한설비공학회:학술대회논문집)
- 2007.06a
- /
- Pages.208-208
- /
- 2007
An Experiment on Evaluation of a Heat Recovery Type Air Washer System for Semiconductor Manufacturing Clean Rooms
반도체 클린룸용 열회수식 에어와셔 시스템의 평가 실험
- Park, Sang-Tae (Aerosol and Contamination Control Labortary, Korea Institute of Industrial Technology) ;
-
Yoo, Kyung-Hoon
(Aerosol and Contamination Control Labortary, Korea Institute of Industrial Technology)
;
-
Yeo, Kuk-Hyun
(Aerosol and Contamination Control Labortary, Korea Institute of Industrial Technology)
;
-
Tae, Kyung-Eung
(Research & Development Center, Daehan PNC)
;
- Son, Seung-Woo (Research & Development Center, Sunglim PS)
- 박상태 (한국생산기술연구원 에어로졸.오염제어 연구실) ;
-
유경훈
(한국생산기술연구원 에어로졸.오염제어 연구실)
;
-
여국현
(한국생산기술연구원 에어로졸.오염제어 연구실)
;
-
태경응
((주)대한피엔씨)
;
- 손승우 ((주)성림피에스)
- Published : 2007.06.20
Abstract
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