한국표면공학회:학술대회논문집 (Proceedings of the Korean Institute of Surface Engineering Conference)
- 한국표면공학회 2007년도 춘계학술발표회 초록집
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- Pages.122-123
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- 2007
Bias voltgae에 따른 TiCrAlSiN 코팅막의 미세구조 분석
Microstructural Characterization of TiCrAlSiN Thin Films Deposited with Various Bias Voltages
- Lee, Jae-Uk ;
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Lee, Jeong-Yong
;
- Vinh, P.V. (Dept. of Solid State Physics and Electronics, Hanoi National University of Education) ;
- Kim, Seon-Gyu
- 발행 : 2007.04.05