한국표면공학회:학술대회논문집 (Proceedings of the Korean Institute of Surface Engineering Conference)
- 한국표면공학회 2007년도 추계학술대회 논문집
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- Pages.136-137
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- 2007
Influence of processing parameters for adhesion strength of TiAlN films prepared by Arc Ion Plating
- Ju, Yun-Gon ;
- Fang, W. ;
- Jo, Dong-Yul ;
- Yun, Jae-Hong ;
- Zhang, S.H.
- 발행 : 2007.11.12
초록
Wear resistant TiAlN thin film has been widely deposited on the surface of cutting and forming tools by using Arc Ion Plating. TiAlN films are deposited by the processes designed by the Taguchi L18 experimental design. The L18 experimental design is applied to achieve surface properties and adhesion. The deposition parameters are working pressure, substrate temperature, bias voltage, arc power and pre-sputtering bias voltage and time. The most influential parameters on surface properties and adhesion are substrate bias voltage, working nitrogen pressure and arc power. The optimal coating processes are obtained for surface properties and adhesion.
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