한국표면공학회:학술대회논문집 (Proceedings of the Korean Institute of Surface Engineering Conference)
- 한국표면공학회 2007년도 추계학술대회 논문집
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- Pages.69-70
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- 2007
보조 전자기 코일이 마그네트론 방전특성에 미치는 영향
Effect of additional electromagnetic coil current on the discharge characteristics of magnetron sputtering
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Byeon, Eung-Seon
;
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Lee, Geon-Hwan
;
- Golosov, Dimitr (Belarussian State University of Information and Radioelectronics) ;
- Svadkovski, Igor (Belarussian State University of Information and Radioelectronics) ;
- Jeon, Sang-Jo ;
- Kim, Yeong-Sin
- 발행 : 2007.11.12