Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2007.11a
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- Pages.50-50
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- 2007
Analysis of Electron Density and Electron Temperature of Inductively Coupled Plasma Using Neural Network
신경망을 이용한 유도결합형 플라즈마의 전자밀도와 전자온도 해석
- Kim, Su-Yeon (Sejong Univ. Electronic Engineering) ;
- Kim, Bung-Whan (Sejong Univ. Electronic Engineering)
- Published : 2007.11.12
Abstract
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