Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2007.11a
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- Pages.23.1-23.1
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- 2007
In-situ diagnosis of tantalum precursors using Fourier transform infrared (FT-IR) spectroscopy
- Kim, Suk-Hoon (Laboratory for Advanced Molecular Processing (LAMP), Department of Chemical Engineering, Pohang University of Science and Technology (POSTECH)) ;
- Song, Moon-Kyun (Laboratory for Advanced Molecular Processing (LAMP), Department of Chemical Engineering, Pohang University of Science and Technology (POSTECH)) ;
- Rhee, Shi-Woo (Laboratory for Advanced Molecular Processing (LAMP), Department of Chemical Engineering, Pohang University of Science and Technology (POSTECH))
- Published : 2007.11.02