한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 2007년도 추계학술발표대회 및
- /
- Pages.19.1-19.1
- /
- 2007
Metal Thin film Prepared by Atomic Layer Deposition for Contact Application of Nanoscale Device
- Bang, Seong-Hwan (POSTECH) ;
- LeeHan, Bo-Ram (POSTECH) ;
- Kim, Hyeong-Jun (POSTECH)
- 발행 : 2007.11.02