한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 2007년도 추계학술발표대회 및
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- Pages.18.1-18.1
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- 2007
Non-saturated Atomic Layer Deposition for Composition Adjustment in $Al_2O_3-HfO_2$ Thin Films
- 발행 : 2007.11.02