Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

2007.11a
/
Pages.18.1-18.1
/
2007

Materials Research Society of Korea (한국재료학회)

권호 표지

Non-saturated Atomic Layer Deposition for Composition Adjustment in $Al_2O_3-HfO_2$ Thin Films

정회성 (한국과학기술원) ;
김지헤 (한국과학기술원) ;
강상원 (한국과학기술원)

Published : 2007.11.02

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Abstract

Keywords

ALD modeling$Al_2O_3-HfO_2$