한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 2007년도 추계학술발표대회 및
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- Pages.14.2-14.2
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- 2007
The preferred (200) orientation tetragonal phase of $HfO_2-Al_2O_3$ thin films by Plasma Enhanced Atomic Layer Deposition
- 발행 : 2007.11.02