Proceedings of the Korea Crystallographic Association Conference (한국결정학회:학술대회논문집)
- 2007.11a
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- Pages.47-47
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- 2007
Dry etching of SiC in inductively coupled $SF_6/O_2$ Plasma
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Yim, Jeong-Hyuk
(School of Materials Scienceand Engineering, Seoul National University)
;
- Lee, Jong-Ho (School of Materials Scienceand Engineering, Seoul National University) ;
- Song, Ho-Keun (School of Materials Scienceand Engineering, Seoul National University) ;
- Moon, Jeong-Hyun (School of Materials Scienceand Engineering, Seoul National University) ;
- Seo, Han-Seok (School of Materials Scienceand Engineering, Seoul National University) ;
- Oh, Myeong-Sook (School of Materials Scienceand Engineering, Seoul National University) ;
- Lee, Jae-Bin (R&D Center, Sangshin Elecom) ;
- Kim, Hyeong-Joon (School of Materials Scienceand Engineering, Seoul National University)
- Published : 2007.11.16
Abstract
Keywords