The growth of MgO thin films deposited by glancing angle deposition method

  • Park, Sun-Young (School of Materials Science & Engineering, Seoul National University) ;
  • Moon, Sung-Hwan (School of Materials Science & Engineering, Seoul National University, Samsung SDI Corporate R & D Center) ;
  • Lee, Joo-Hwi (School of Materials Science & Engineering, Seoul National University) ;
  • Kim, Jae-Hyuk (School of Materials Science & Engineering, Seoul National University, Samsung SDI Corporate R & D Center) ;
  • Heo, Tae-Wook (School of Materials Science & Engineering, Seoul National University) ;
  • Kim, Hyeong-Joon (School of Materials Science & Engineering, Seoul National University, Inter-University Semiconductor Research Center, Seoul National University)
  • Published : 2007.11.16