Homoepitaxial growth of 4H-SiC by Hot-wall CVD using BTMSM

  • Seo, Han-Seok (School of Materials Science & Engineering, Seoul National University) ;
  • Song, Ho-Keun (School of Materials Science & Engineering, Seoul National University) ;
  • Moon, Jeong-Hyun (School of Materials Science & Engineering, Seoul National University) ;
  • Yim, Jeong-Hyuk (School of Materials Science & Engineering, Seoul National University) ;
  • Oh, Myeong-Sook (School of Materials Science & Engineering, Seoul National University) ;
  • Kim, Hyeong-Joon (School of Materials Science & Engineering, Seoul National University)
  • Published : 2007.11.16