Proceedings of the Korea Crystallographic Association Conference (한국결정학회:학술대회논문집)

Korean Crystallographic Association (한국결정학회)
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Deposition and Characterization of $Al_2O_3$ Thin Film by Aerosol Deposition

  • Cho, Hyun-Min (Electronic Materials and Packaging Research Center, Korea Electronics Technology Institute, School of Materials Science & Engineering, Seoul National University) ;
  • Kim, Hyeong-Joon (School of Materials Science & Engineering, Seoul National University)
  • Published : 2007.11.16
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