Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Growth of 3C-SiC nanowires on nickel coated Si(100) substrate using dichloromethylvinylsilane and diethylmethylsilane by MOCVD method

  • Hyun, J.S (Department of Chemistry, Sungkyunkwan University) ;
  • Nam, S.H. (Department of Chemistry, Sungkyunkwan University) ;
  • Kang, B.C. (Department of Chemistry, Sungkyunkwan University) ;
  • Boo, J.H. (Department of Chemistry, Sungkyunkwan University)
  • Published : 2007.08.15
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