The electrical properties of NVM with Si nanocluster formed by a pulse-type gas feeding technique in the LPCVD system

Kim, Kyong-Min (Department of Nano Science & Technology, University of Seoul) ;
Kim, Eun-Kyeom (Department of Nano Science & Technology, University of Seoul) ;
Kim, Jeong-Ho (Department of Nano Science & Technology, University of Seoul) ;
Son, Dae-Ho (Department of Nano Science & Technology, University of Seoul) ;
Bae, Myeong-Wook (Department of Physics, University of Seoul) ;
Koo, Hyun-Mo (Department of Nano Science & Technology, University of Seoul) ;
Cho, Won-Ju (Department of Electronic Materials Engineering, Kwangwoon University) ;
Han, Moon-Sup (Department of Physics, University of Seoul) ;
Won, Sung-Hwan (Department of Nano Science & Technology, University of Seoul) ;
Hong, Wan-Shick (Department of Nano Science & Technology, University of Seoul) ;
Sok, Jung-Hyun (Department of Nano Science & Technology, University of Seoul) ;
Park, Kyoung-Wan (Department of Nano Science & Technology, University of Seoul)