In-situ FT-IR monitoring of a MOCVD process for the growth of Al film using aluminum boro-hydride trimethylamine

• Park, Young-Jae (UST) ;
• Yang, Jae-Young (Korea Research Institute of Standards and Science) ;
• Yun, Ju-Young (Korea Research Institute of Standards and Science) ;
• Kang, Sang-Woo (Korea Research Institute of Standards and Science) ;
• Seong, Dae-Jin (Korea Research Institute of Standards and Science) ;
• Shin, Yong-Hyun (Korea Research Institute of Standards and Science) ;
• Yang, Il-Doo (Quleap) ;
• Shim, Jae-Yong (Quleap) ;
• Oh, Jae-Cheol (Quleap)

• Published : 2007.08.15

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