The optical property of GZO and ZnO thin films deposited by RF magnetron sputtering

  • Hwang, S.J. (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
  • Jeon, H.H. (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
  • Kim, G.C. (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
  • Lee, J.S. (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
  • Kim, D.H. (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
  • Choi, W.B. (Department of mechanical and materials engineering, Florida International University) ;
  • Jeon, M.H. (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University)
  • Published : 2007.08.15