Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2007.08a
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- Pages.283-283
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- 2007
The effect of annealing temperature on structural and optical properties of ZnO films deposited by rf magnetron sputtering
- Kim, G.C. (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
- Jeon, H.H (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University, Department of mechanical and materials engineering, Florida International University) ;
- Hwangboe, S.J. (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
- Lee, J.S. (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
- Kim, D.H. (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
- Choi, W.B. (Department of mechanical and materials engineering, Florida International University) ;
- Jeon, M.H. (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University)
- Published : 2007.08.15
Abstract
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