Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Step Annealing Effects on Be-doped GaAs layer grown by Molecular Beam Epitaxy

  • Kim, Jae-Kyu (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
  • Park, Chi-Young (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
  • Jang, Jae-Ho (School of Nano Engineering, Center for Nano Manufacturing, Inje University) ;
  • Ryu, Hyuk-Hyun (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University, School of Nano Engineering, Center for Nano Manufacturing, Inje University) ;
  • Leem, Jae-Young (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University, School of Nano Engineering, Center for Nano Manufacturing, Inje University) ;
  • Jeon, Min-Hyon (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University, School of Nano Engineering, Center for Nano Manufacturing, Inje University)
  • Published : 2007.08.15
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