한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2007년도 제33회 하계학술대회 초록집
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- Pages.260-260
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- 2007
A Study on the Characteristics of Low Dielectric Constant SiOC(-H) Films Deposited with Various Substrate Temperature
- Kim, Seung-Hyun (Nano Thin film Material Laboratory, Department of Physics, Cheju National University) ;
- Kim, Chang-Young (Nano Thin film Material Laboratory, Department of Physics, Cheju National University) ;
- Navamathavan, R. (Nano Thin film Material Laboratory, Department of Physics, Cheju National University) ;
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Choi, Chi-Kyu
(Nano Thin film Material Laboratory, Department of Physics, Cheju National University)
- 발행 : 2007.08.15