한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2007년도 제33회 하계학술대회 초록집
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- Pages.255-255
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- 2007
Effect of pressure on the chemical composition and structure of carbon nitride film deposited by RF magnetron sputtering
- Roh, Ki-Min (Korea Advanced Institute of Science and Engineering) ;
- Na, Byung-Keun (Korea Advanced Institute of Science and Engineering) ;
- Choi, Si-Kyoung (Korea Advanced Institute of Science and Engineering) ;
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Kim, Jung-Hyung
(Korea Research Institute of Standards and Science)
- 발행 : 2007.08.15