Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2007.08a
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- Pages.245-245
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- 2007
A Study for Properties of SiOC(-H) Thin Films with $Low-{\kappa}$ Formed by UV-Assisted PECVD Method
- Kim, Chang-Young (Nano Thin film Material Laboratory, Department of Physics, Cheju National University) ;
- Jang, Young-Jun (Nano Thin film Material Laboratory, Department of Physics, Cheju National University) ;
- Navamathavan, R. (Nano Thin film Material Laboratory, Department of Physics, Cheju National University) ;
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Choi, Chi-Kyu
(Nano Thin film Material Laboratory, Department of Physics, Cheju National University)
- Published : 2007.08.15
Abstract
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