Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2007.08a
- /
- Pages.244-244
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- 2007
Reduction of Defects at the $SiO_2/SiC$ Interface by MeV Electron Beam Irradiation
- Jeon, C. (Department of Physics, Sungkyunkwan University) ;
- Nam, J.H. (Department of Physics, Sungkyunkwan University) ;
- Song, W. (Department of Physics, Sungkyunkwan University) ;
- Jung, M.C. (Pohang Accelerator Laboratory) ;
- Shin, H.J. (Pohang Accelerator Laboratory) ;
- Han, Y.H. (KAERI) ;
- Lee, B.C. (KAERI) ;
-
Park, C.Y.
(Department of Physics, Sungkyunkwan University)
;
- Ahn, J.R. (Department of Physics, Sungkyunkwan University)
- Published : 2007.08.15
Abstract
Keywords